Innovative Thin-Film Systems

In the section ITS we develop, produce and modificate PECVD-Equipments with emphasis on carbon-based layers. In this field we strongly cooperate with the Fraunhofer-Institut für Werkstoffmechanik (IWM). An overview of our projects can be found on our pages about Thin-Film-Projects.

Through a joint thin film development work with the Fraunhofer-Institut IWM, we established the basic parameters for upscaleable Deposition Technology Units. In accordance with the knowledge derived from corresponding tribological and chemical evaluations specific electrode and gas-inlet systems were tested. These electrodes are manufactured by inprotec AG and integrated afterwards in the IWM-Laboratory-PECVD-Equipments.

The process as such is iterative: the electrodes and gas-inlet systems being under continuous testing runs are optimized in relation to their suitability during the corresponding process applied. The quality of the films created provides the basics to generate hand-in-hand new solutions to be applied under the relevant limiting conditions to the IWM-Laboratory-PECVD-Equipments. The Scale-Up feasibility is being continuously evaluated and screened through different geometrical arrangements or through a large number of parts to be coated. The optimized electrodes and gas-inlet systems are manufactured according the specific geometrical dimensions of each equipment.

It is an empirical fact that when putting a deposition cell prototype into operation for the first time the results might sometimes be suboptimal or even deficient. The clearing of such start-up problems is carried out by inprotec under close cooperation with the Fraunhofer-Institut IWM.

Moreover we cooperate in the area of Development of Equipment Components. For example, we develop electrodes, gas distribution systems / showerheads, gas outlet systems or containers.